Model 9360 & 9370 Series

Ultra high-purity stainless steel regulators with a tied seat design, for use with corrosive, toxic, or pyrophoric gases.

Applications

All semiconductor industry gas applications, such as dispensing of dopant or etchant gases, or handling hazardous gases.

Design Features/Components:

• Available in two choices of materials: 316L stainless steel with 316 stainless steel internals (Model 9360 Series), or 316L stainless steel with Hastelloy C-22 internals (Model 9370 Series).
• Tied seat design ensures regulator closure under extreme conditions.
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• Only one non-metallic seal in the process stream
• Standard 10-15 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a class 100 clean area
• Body screw thread tapped for back mounting

• Gauges: 316L stainless steel 316L stainless steel
• Body: 316L stainless steel 316L stainless steel
• Bonnet: Nickel plated brass Nickel plated brass
• Diaphragm: 316 stainless steel Hastelloy C-22
• Seat: Kel-F 81 Kel-F 81
• Linkage: 316 stainless steel Hastelloy C-22
• Spring: 316 stainless steel Hastelloy C-22
• Seals: Metal to metal Metal to metal

Specifications:

• Maximum Inlet Pressure: 3000 psig (20,700 kPa)
• Maximum Flow Rate: 9367 - 17 SCFM (480 SLPM)
• (At 3000 psig Inlet, N2) 9363 - 7 SCFM (200 SLPM)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Porting: 1/4” VCR compatible
• Porting Configuration: 2 High, 2 Low
• Shipping Weight: 5 lbs